. . "NATO advanced research workshop on nanolithography, a borderland betwen STM, EB, IB, and X-ray lithographies (1993 ; Frascati, Italie)"@fr . "12477043"^^ . . . . . . . "NATO advanced research workshop on nanolithography, a borderland betwen STM, EB, IB, and X-ray lithographies (1993 ; Frascati, Italie)"@fr . . "1993"^^ . . . . . . "1995-08-17" . . . . "1993"^^ . . "1995-08-17" .