. "2013-08-09" . . "En poste : NEC corporation, Tsukuba, Japon (en 2000)"@fr . . . . "Sub-half-micron lithography for ULSIs / edited by Katsumi Suzuki, Shinji Matsui and Yukinori Ochiai, cop. 2000. - . - VIAF. - http://viaf.org. - 2011-09-28"@fr . . . "2013-08-08"^^ . "Suzuki" . . "male" . "Katsumi" . "VIAF" . . . "1950"^^ . "Katsumi Suzuki"@fr . . . "En poste : NEC corporation, Tsukuba, Japon (en 2000)" . . . "Katsumi Suzuki" . "0000000037877616" . "En poste : NEC corporation, Tsukuba, Japon (en 2000)" . "16539532"^^ . . "2011-09-28" .